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PSM-LHe series

PSM-LHe series

The PSM-LHe series liquid helium low-temperature probe station can provide a 1.6K-450K high and low temperature vacuum testing environment for electrical parameter testing of semiconductor chips. By connecting different electrical measuring instruments externally, it can complete the detection of parameters such as voltage, current, resistance, and IV curve of integrated circuits, and is used for non-destructive electrical testing of chips, wafers, and devices in low-temperature vacuum environments.

PSM-LHe series Overview

   The liquid helium low-temperature probe station plays a crucial role in scientific research and technological development. It can perform various non-destructive physical and electrical performance tests on samples at low temperatures, helping researchers gain a deeper understanding of the various physical and electrical properties of materials or devices, and providing important data support for the development and application of new materials.
         The PSM-LHe series liquid helium low-temperature probe station can provide a 1.6K-450K high and low temperature vacuum testing environment for electrical parameter testing of semiconductor chips. By connecting different electrical measuring instruments externally, it can complete the detection of parameters such as voltage, current, resistance, and IV curve of integrated circuits, and is used for non-destructive electrical testing of chips, wafers, and devices in low-temperature vacuum environments.

Feature:
• Liquid helium low-temperature vacuum probe station, with a chamber vacuum degree of up to 10E-4 torr.
• The displacement adjustment of the probe arm is operated outside the vacuum chamber, allowing for switching between different devices on the sample for testing without damaging the vacuum.
• Unique probe arm X-Y-Z-R four-dimensional adjustment, capable of testing up to 4-inch samples. Up to 6 probe arms can be installed simultaneously, and probe arms can be selected from DC arm, fiber arm, microwave arm, etc.
• The material of the vacuum chamber is aluminum, which can effectively reduce external electromagnetic interference and improve the accuracy and stability of testing.
• The probe arm adopts a three coaxial connector with good leakage performance, and the measured leakage current is less than 30fA@1V @1.6K--450K。
• Wide temperature range for testing, supporting up to 1.6K-450K continuous temperature variation.

PSM-LHe series Technical Parameter

Parameters and indicators:

Probe station host classification
model
PSM-LHe-2
 PSM-LHe-4
temperature range
1.6K--450K
1.6K--450K
Temperature control stability
+/-50mK
Sample holder
Type and Material
Oxygen free copper grounding gold-plated sample holder
size2 inches4 inches
Optional specifications
Insulation sample holder (temperature can only reach 400K)
Coaxial sample holder (temperature can only reach 400K)
Triple coaxial sample holder (temperature can only reach 400K)
Probe arm
type
DC probe arm (standard)
Customizable specifications
Microwave probe arm, fiber optic probe arm, thermocouple probe arm
quantity4
Connectors and cables
Triple coaxial connector+ultra-thin coaxial low-temperature cable
leakage current
30fA@1V in a vacuum environment
signal frequency
DC-50MHz
match impedance
50Ω
displacement rangeX+/- 12.5mm,Y+/- 50mm 
Z +/-7.5mm, R+/-10°
X+/- 12.5mm,Y+/- 50mm 
Z +/-7.5mm, R+/-10°
Optical system
Microscope magnification
500times
resolution
less than 2 microns
field of view
up to 22mm
working distance
90-100mm
vacuum chamber
material
aluminum alloy
vacuum chamber size
8-inch
Window size
2 inches
4 inches
Vacuum chamber window
Infrared absorption window
inner layer
Standard quartz window
degree of vacuum
 5E-4 torr
reserved interface
2 probe arm interfaces&2 electrical interfaces
Radiation shielding material
stainless steel
Specialized vibration isolation table
size
800*800*800
900*900*800
Table push
Fixed feet&rollers
vibration dampingGravity damping&air floating damping pad

PSM-LHe series Basic Configuration

Semiconductor
IC
Wafer

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